Abstract: With the development of variable speed drives, motor bearings are submitted to additional stress due to parasitic currents which deteriorate bearing raceways, rolling elements and lubricant.
Abstract: Ruthenium (Ru) etch mechanisms, challenges, and progress are reviewed. Conventional Ru etch chemistries are limited and have substrate compatibility or toxic-material-release concerns.
Some results have been hidden because they may be inaccessible to you
Show inaccessible results