Atomic layer deposition (ALD) of titanium dioxide (TiOâ‚‚) enables the fabrication of ultrathin, conformal coatings by alternating pulses of a titanium precursor and an oxidant under self-limiting ...
Researchers at ISC Konstanz found that ALD-based aluminum oxide (AlOx) passivation layers provide better UV stability for TOPCon solar cells than PECVD-deposited layers, with thicker AlOx films and a ...